Enhanced resolution in the low kv region with new electron source technology.

Carl Zeiss introduces EVO® HD, its latest innovation in the conventional Scanning Electron Microscopy (C-SEM) market segment. Delivering much higher resolution at low acceleration voltages compared to present conventional SEM, the EVO® HD introduces High Definition to electron microscopy.

The technological basis for this achievement is the new EVO® HD source which features a higher source brightness. This brightness results in an improvement in resolution at low-kV relative to conventional tungsten SEMs. The improved source properties also aid analytical applications with a 30% increase in resolution at 30kV and 1nA.

“We are convinced that this is the most significant innovation in the market for conventional SEM in the last decade. Numerous applications in both life sciences and materials analysis will benefit from the increased performance”, explains Allister Mc Bride from Carl Zeiss Nano Technology Systems division at Cambridge.